X-ray tube
X-ray source
Industrial DR
Industrial CT
Microfocus inspection
Orientation Instrument
Diffractometer
Automated Crystal Rod Orienting Instrument
RSO30-03
High-precision calibration
Multi-size compatibility
Servo Automation
Improve efficiency and yield rate
A high-precision X-ray alignment system specially designed for semiconductor ingot processing, used to achieve precise angular calibration prior to end-face and reference-edge grinding. The equipment integrates a high-sensitivity scintillation detector with servo‑controlled automatic adjustment, delivering exceptional repeatability. Its all‑metal, semi‑enclosed protective housing is equipped with an intelligent touchscreen that supports degree‑minute‑second and decimal‑degree displays. It accommodates 4‑, 6‑, and 8‑inch ingots and can be paired with multiple grinders, significantly boosting processing efficiency and yield.
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- Product Introduction
- Technical Specifications
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- Commodity name: Automated Crystal Rod Orienting Instrument
- Commodity ID: RSO30-03
- 设备类型: Directional instrument
- 标签蓝: High-precision calibration
- 标签绿: Multi-size compatibility
- 标签橙: Servo Automation
- 标签红: Improve efficiency and yield rate
- 检测类型: Angle calibration prior to grinding the end face and reference edge of the ingot.
- 检测方式: Automated Horizontal Inspection
- 设备类型: Medium-sized equipment
- 特点: Medium-sized equipment | Fully automatic crystal orientation alignment | Online automated inspection
A high-precision X-ray alignment system specially designed for semiconductor ingot processing, used to achieve precise angular calibration prior to end-face and reference-edge grinding. The equipment integrates a high-sensitivity scintillation detector with servo‑controlled automatic adjustment, delivering exceptional repeatability. Its all‑metal, semi‑enclosed protective housing is equipped with an intelligent touchscreen that supports degree‑minute‑second and decimal‑degree displays. It accommodates 4‑, 6‑, and 8‑inch ingots and can be paired with multiple grinders, significantly boosting processing efficiency and yield.
Core Features and Advantages of the Product
High-precision X-ray alignment system for accurate calibration of crystal rod angles.
Specifically developed for pre‑grinding angle calibration of ingot end faces and reference edges. Featuring a high‑sensitivity scintillation detector and servo‑controlled automatic adjustment, it delivers exceptionally high repeatability. An intelligent touchscreen provides dual‑mode display and accommodates a wide range of ingot specifications. The all‑metal, semi‑enclosed protective housing enables seamless collaboration with multiple grinding machines.Ultra‑high precision ensures consistent angular positioning, eliminating uneven end‑face grinding and reference‑edge misalignment, thereby significantly reducing scrap rates. The intuitive touchscreen interface lowers training costs and minimizes the risk of operator error. A single machine accommodates multiple specifications, avoiding redundant capital investment. The all‑metal housing guarantees stable operation even in dusty environments, while coordinated multi‑grinder integration optimizes production throughput.Flexible compatibility, supporting mainstream ingot specifications.
Supports measurement of ingots across multiple diameter specifications, with a modular fixture design that enables quick and seamless specification changes. The entire machine has been optimized for rigidity, ensuring stable mechanical performance even under high‑intensity operations.It enables rapid changeovers without replacing core components, reducing capital investment and changeover time. Measurement accuracy remains consistent even for large‑size ingots. Its modular design lowers the operational threshold, making it suitable for mixed‑specification, multi‑line production and enhancing equipment utilization and return on investment.Pure signal + low radiation, ensuring safe and reliable detection.
High-sensitivity detectors effectively suppress stray interference, ensuring a clean signal. The low-radiation X-ray system controls dose at the source, and its multi-layered shielding, combined with an all-metal housing, delivers radiation safety that exceeds industry standards.Pure‑signal assurance ensures measurement accuracy, preventing misjudgments and redundant inspections. Its low‑radiation design allows for deployment in open areas of the production line without requiring additional shielding. The X‑ray tube boasts a long service life, reducing downtime for maintenance and lowering consumable replacement costs.Intelligent operations reduce reliance on human labor.
The intelligent touchscreen supports one-touch switching between two modes, with intuitive parameter settings. Servo‑based automatic adjustment enables automated closed-loop control, minimizing manual intervention.A brief training session is all it takes to get operators up and running, minimizing the impact of staff turnover. Automatic adjustments eliminate human error, making the system easy for even unskilled workers to operate. Automated processes ensure batch-to-batch consistency, ideal for standardized operations on large-scale production lines.Stable and reliable, designed to withstand harsh environments.
All-metal semi‑enclosed housing; critical components undergo rigidity optimization and impact‑resistant treatment to withstand harsh operating conditions such as dust and vibration. Core components are designed for extended service life.Effectively blocks dust and impacts, reducing downtime and precision drift while extending the operational cycle. Rigidity‑optimized design ensures stable performance under high‑frequency use, lowering the frequency of calibration and maintenance. A long‑life design minimizes spare‑parts inventory, enabling extended continuous operation with peace of mind.Detection Feature Showcase
The lifting and positioning system performs focus alignment for crystal rods of varying lengths and diameters based on the displacement sensor’s feedback values. 
Intelligent servo control
Shan Dong adjusts the crystal rod’s angle, replacing traditional manual operation and reducing human error.
Industrial-grade protective design
All-metal semi‑enclosed design, dust‑proof and interference‑resistant, ensuring long‑term stable operation.
Human-Computer Interaction Optimization
The touchscreen provides real-time display and supports dynamic setting of the standard angle, offering intuitive and convenient operation.
Ultra-high-sensitivity detector
Counting rate of 10^8 counts per second, with no need for repeated adjustments, accurately capturing valid signals.
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Project
Content
Diffraction method Single diffraction Receiving System Scintillation detector, with a count rate of 10⁸ per second. X-ray tube current intensity 0-1.0mA Detection accuracy Single diffraction (X-rays are filtered through a slit and directed onto the sample) ±30″ (±0.0083°) Display System Display in degrees–minutes–seconds or in degrees; manually set the reference angle; and display in real time the angular deviation between the crystal under test and the reference angle. Angle measurement θ: 0~+45°, 2θ: 0~+90° Inspect workpiece dimensions 4 inches, 6 inches, 8 inches, length ≤ 200 mm Input power supply Single-phase AC 220 V supply, rated current 2.3 A, rated power 500 W. Main detection range The pre‑cutting grinding step of the ingot is accomplished by measuring and adjusting the ingot along the X‑ and Y‑axes. Scope of Application This system is specifically designed for precise angular calibration of semiconductor boule end faces and reference edges prior to grinding, compatible with multiple mainstream boule specifications, and capable of interfacing with multiple grinders for coordinated operation. It is suitable for the fabrication processes of both silicon wafers and compound‑semiconductor boules.
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RAYSOV Instrument Co., Ltd.
Address: No. 57, Longteng Avenue, Zhen’an District, Dandong City, Liaoning Province, China
Email:info@raysov.com
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Fax: 0415-6277566
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